Waste Gas Abatement (DAS Environmental Expert)
The new SPRUCE system developed by DAS Environmental Expert safely abates dangerous waste gases from semiconductor manufacturing processes. The system operates entirely without fuel gas. SPRUCE was specifically designed for the waste gas abatement of CVD processes in the semiconductor industry where many of the gases used in these processes are toxic, highly flammable, explosive, or harmful to the environment. The gases are introduced through a maximum of four separate inlets into a reactor, which is heated electrically from the outside. The heat inside the reactor breaks down the waste gases and, depending on their chemical composition, various reactions take place. In the subsequent scrubbing stage, gaseous and solid compounds generated by this process are absorbed and cooled down by a suitable scrubbing liquid. DAS Environmental Expert www.das-europe.com +49 351 40494 000