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A 21st Century Approach to Airborne Molecular Contamination Control
By Jitze Stienstra Ph.D., Joseph Wildgoose, Jürgen Lobert Ph. D., Christopher Vroman, David Ruede
AMC control in the fab requires not just the knowledge of which contaminants can be harmful, but requires a high level of competency in several disciplines for the careful selection and implementation of products to result in a total solution.
The ability to control Airborne Molecular Contaminants (AMC) and their interactions with semiconductor fabrication processes and equipment requires a new, comprehensive approach. Multiple disciplines and competencies are required to bring a systematic understanding to both the challenges and potential solutions. Four steps that comprise the essential elements needed in a multistep, multilevel, integrated approach to data-driven and cost-effective 21st century AMC control are explored in this article.
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