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Editorial By Paul Nesdore July/August 2010
Recently, Linde has been promoting moving from NF3 moting to F2 for cleaning in the PV manufacturing. arena.1 This has generated much discussion regarding the use of NF3 and F2. We take a look at NF3 in this editorial, and F2 in the next issue, hoping to shed some light on these two gases, their efficacy, CoO, and GHG connection.