As helium prices skyrocket, an alternative source for leak test gases was found by Hill PHOENIX as they switched from helium to N2/H2 for substantial cost savings.
Benefits of retrofitting 200mm and 150mm process tools with a diffuser in applications where loadlock vent-up time is a rate-limiting step and/or particles in the loadlock are an issue.
In Gaugin’s famous Tahitian painting the above words appear (Where Do We Come
From? What Are We? Where Are We Going?). After nine issues of Gases & Instrumentation
(G&I), it is time to ask ourselves these questions.